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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
10/06/2015
Application #:
13071360
Filing Dt:
03/24/2011
Publication #:
Pub Dt:
03/22/2012
Inventor:
Tadashi MITSUI
Title:
PATTERN DEFECT INSPECTION USING DATA BASED ON SECONDARY ELECTRON FROM PATTERN
Assignment: 1
Reel/Frame:
026231/0383Recorded: 05/05/2011Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
04/14/2011
Assignee:
1-1, SHIBAURA 1-CHOME, MINATO-KU,
TOKYO, JAPAN
Correspondent:
FINNEGAN HENDERSON ET AL.
901 NEW YORK AVE., NW
WASHINGTON, DC 20001

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