Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/29/2015
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Application #:
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14639980
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Filing Dt:
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03/05/2015
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Inventors:
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Fajun Yang, MengChu Zhou, Naiqi Wu, Yan Qiao
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Title:
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Method for Scheduling Single-arm Cluster Tools with Wafer Revisiting and Residency Time Constraints
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| AVENIDA WAI LONG, TAIPA |
| MACAU, MACAU |
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| ELLA CHEONG HONG KONG |
| 5001 HOPEWELL CENTRE |
| 183 QUEEN'S ROAD EAST, WAN CHAI |
| HONG KONG, HONG KONG |
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