Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/12/2016
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Application #:
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12978103
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Filing Dt:
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12/23/2010
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Publication #:
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Pub Dt:
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06/30/2011
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Inventors:
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Matthias Manger, Armin Rauthe-Schoech, Ulrich Mueller
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Title:
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PROJECTION EXPOSURE SYSTEM FOR MICROLITHOGRAPHY AND METHOD OF MONITORING A LATERAL IMAGING STABILITY
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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RUDOLF-EBER-STRASSE 2 |
OBERKOCHEN, GERMANY 73447 |
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GEORGE F. LEHNIGK |
2100 PENNSYLVANIA AVE, NW |
SUITE 800 |
WASHINGTON, DC 20035 |
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