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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
9404181
Issue Dt:
08/02/2016
Application #:
13412675
Filing Dt:
03/06/2012
Publication #:
20130125815
Pub Dt:
05/23/2013
Inventors:
Bo-Heng Liu, Chi-Chung Kei, Meng-Yen Tsai, Wen-Hao Cho, Chih-Chieh Yu, Chien-Nan Hsiao et al
Title:
PLASMA ENHANCED ATOMIC LAYER DEPOSITION SYSTEM
Assignment: 1
Reel/Frame:
027809/0749Recorded: 03/06/2012Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
LIU, BO-HENG
Exec Dt:
03/03/2012
KEI, CHI-CHUNG
Exec Dt:
03/03/2012
TSAI, MENG-YEN
Exec Dt:
03/03/2012
CHO, WEN-HAO
Exec Dt:
03/03/2012
YU, CHIH-CHIEH
Exec Dt:
03/03/2012
HSIAO, CHIEN-NAN
Exec Dt:
03/03/2012
LIU, DA-REN
Exec Dt:
03/03/2012
Assignee:
NATIONAL APPLIED RESEARCH LABORATORIES
NO. 20, R&D RD. VI, HSINCHU SCIENCE PARK,
HSINCHU 30076, TAIWAN
Correspondent:
HDLS IPR SERVICES
PO BOX 220746
CHANTILLY, VA 20153

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