Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/23/2016
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Application #:
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14525250
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Filing Dt:
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10/28/2014
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Publication #:
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Pub Dt:
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04/30/2015
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Inventor:
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Akira SHIMIZU
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Title:
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METHOD AND APPARATUS FOR FORMING SILICON OXYCARBONITRIDE FILM, SILICON OXYCARBIDE FILM AND SILICON OXYNITRIDE FILM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| AKASAKA BIZ TOWER, 3-1, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 1076325 |
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| NATH, GOLDBERG & MEYER |
| 112 SOUTH WEST STREET |
| 33459U_JLM_LC |
| ALEXANDRIA, VA 22314 |
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