Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/20/2016
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Application #:
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14586945
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Filing Dt:
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12/30/2014
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Publication #:
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Pub Dt:
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07/02/2015
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Inventors:
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Seung-Hyun LEE, Gerhard POHLERS, Wenyan YIN, Shintaro YAMADA, Cong LIU, Kevin ROWELL et al
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Title:
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PHOTORESIST PATTERN TRIMMING COMPOSITIONS AND METHODS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 455 FOREST STREET |
| MARLBOROUGH, MASSACHUSETTS 01752 |
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| ROHM AND HAAS ELECTRONIC MATERIALS LLC |
| 455 FOREST STREET |
| MARLBOROUGH, MA 01752 |
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