Patent Assignment Abstract of Title
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Total Assignments:
4
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Patent #:
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Issue Dt:
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09/20/2016
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Application #:
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13910912
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Filing Dt:
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06/05/2013
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Publication #:
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Pub Dt:
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10/10/2013
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Inventors:
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Lars Wischmeier, Stephan Kellner, Markus Deguenther, Udo Dinger, Markus Hauf et al
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Title:
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EUV Lithography System
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ROBERT-KOCH-STRASSE 27 |
| SAABRUECKEN, GERMANY 66125 |
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| SEAN P. DALEY |
| FISH & RICHARDSON P.C. |
| P.O.BOX 1022 |
| MINNEAPOLIS, MN 55440-1022 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| RUDOLF-EBER-STRASSE 2 |
| OBERKOCHEN, GERMANY 73447 |
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| SEAN P. DALEY |
| FISH & RICHARDSON P.C. |
| P.O.BOX 1022 |
| MINNEAPOLIS, MN 55440-1022 |
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Assignment:
3
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| RUDOLF-EBER-STRASSE 2 |
| OBERKOCHEN, GERMANY 73447 |
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| SEAN P. DALEY |
| FISH & RICHARDSON P.C. |
| P.O.BOX 1022 |
| MINNEAPOLIS, MN 55440-1022 |
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Assignment:
4
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CORRECTIVE ASSIGNMENT TO CORRECT THE INVENTOR IGOR GUREVICH SHOULD BE DELETED FROM THE ASSIGNMENT PREVIOUSLY RECORDED ON REEL 032379 FRAME 0012. ASSIGNOR(S) HEREBY CONFIRMS THE CORRECT INVENTORS ARE UDO DINGER, LARS WISCHMEIER, MARKUS HAUF, STEPHAN KELLNER AND MARKUS DEGUENTHER.
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| RUDOLF-EBER-STRASSE 2 |
| OBERKOCHEN, GERMANY 73447 |
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| SEAN P. DALEY |
| FISH & RICHARDSON P.C. |
| P.O.BOX 1022 |
| MINNEAPOLIS, MN 55440-1022 |
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