Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/27/2016
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Application #:
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13722248
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Filing Dt:
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12/20/2012
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Publication #:
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Pub Dt:
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06/26/2014
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Inventors:
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Thoralf Kautzsch, Heiko Froehlich, Mirko Vogt, Maik Stegemann
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Title:
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METHOD FOR MANUFACTURING A MICROMECHANICAL SYSTEM COMPRISING A REMOVAL OF SACRIFICIAL MATERIAL THROUGH A HOLE IN A MARGIN REGION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| KOENIGSBRUECKER STR. 180 |
| DRESDEN, GERMANY 01099 |
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| ESCHWEILER & ASSOCIATES LLC |
| 629 EUCLID AVENUE, SUITE 1000 |
| NATIONAL CITY BUILDING |
| CLEVELAND, OH 44114 |
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