Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/11/2016
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Application #:
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14853115
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Filing Dt:
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09/14/2015
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Inventors:
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Qinghua Zhong, Ryan Martin, Ganesh Upadhyaya
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Title:
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DETERMINATION OF SEMICONDUCTOR CHAMBER OPERATING PARAMETERS FOR THE OPTIMIZATION OF CRITICAL DIMENSION UNIFORMITY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| JOSE M. NUNEZ |
| 710 LAKEWAY DRIVE |
| SUITE 200 |
| SUNNYVALE, CA 94085 |
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