Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/06/2016
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Application #:
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13774025
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Filing Dt:
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02/22/2013
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Publication #:
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Pub Dt:
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08/28/2014
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Inventors:
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Gregory R. Brady, Lawrence D. Rotter, Anatoly Shchemelinin, Muzammil A. Arain et al
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Title:
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Systems for Providing Illumination in Optical Metrology
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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ONE TECHNOLOGY DRIVE |
MILPITAS, CALIFORNIA 95035 |
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SUITER SWANTZ/KLA JOINT CUSTOMER NUMBER |
14301 FNB PARKWAY |
SUITE 220 |
OMAHA, NE 68154-5299 |
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