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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
12/13/2016
Application #:
14962266
Filing Dt:
12/08/2015
Publication #:
Pub Dt:
03/31/2016
Inventors:
Burn Jeng Lin, Shy-Jay Lin, Jaw-Jung Shin, Wen-Chuan Wang
Title:
SYSTEMS AND METHODS FOR HIGH-THROUGHPUT AND SMALL-FOOTPRINT SCANNING EXPOSURE FOR LITHOGRAPHY
Assignment: 1
Reel/Frame:
037236/0866Recorded: 12/08/2015Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
06/20/2014
Exec Dt:
06/19/2014
Exec Dt:
06/19/2014
Exec Dt:
06/19/2014
Assignee:
NO. 8, LI-HSIN ROAD 6
SCIENCE-BASED INDUSTRIAL PARK
HSIN-CHU, TAIWAN 300-77
Correspondent:
HAYNES AND BOONE, LLP IP SECTION
2323 VICTORY AVENUE
SUITE 700
DALLAS, TX 75219

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