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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
01/03/2017
Application #:
14403010
Filing Dt:
11/21/2014
Publication #:
Pub Dt:
05/21/2015
Inventors:
Martin Jacobus Johan Jak, Armand Eugene Albert Koolen, Hendrik Jan Hidde Smilde
Title:
Metrology Method and Apparatus, Substrate, Lithographic System and Device Manufacturing Method
Assignment: 1
Reel/Frame:
037782/0891Recorded: 02/22/2016Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
06/19/2012
Exec Dt:
06/20/2012
Exec Dt:
06/19/2012
Assignee:
P.O. BOX 324
VELDHOVEN, NETHERLANDS 5500 AH
Correspondent:
STERNE, KESSLER, GOLDSTEIN & FOX P.L.L.C
1100 NEW YORK AVENUE, N.W.
WASHINGTON, DC 20005

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