Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/03/2017
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Application #:
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14403010
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Filing Dt:
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11/21/2014
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Publication #:
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Pub Dt:
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05/21/2015
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Inventors:
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Martin Jacobus Johan Jak, Armand Eugene Albert Koolen, Hendrik Jan Hidde Smilde
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Title:
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Metrology Method and Apparatus, Substrate, Lithographic System and Device Manufacturing Method
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 324 |
| VELDHOVEN, NETHERLANDS 5500 AH |
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| STERNE, KESSLER, GOLDSTEIN & FOX P.L.L.C |
| 1100 NEW YORK AVENUE, N.W. |
| WASHINGTON, DC 20005 |
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