Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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01/10/2017
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Application #:
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15011218
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Filing Dt:
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01/29/2016
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Publication #:
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Pub Dt:
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06/09/2016
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Inventor:
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Alexander I. ERSHOV
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Title:
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METHOD OF TEMPERATURE COMPENSATION IN HIGH POWER FOCUSING SYSTEM FOR EUV LPP SOURCE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 17075 THORNMINT COURT |
| SAN DIEGO, CALIFORNIA 92127 |
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| ARENT FOX LLP |
| 1717 K STREET, NW |
| WASHINGTON, DC 20006 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 6501 |
| VELDHOVEN, NETHERLANDS 5504 DR |
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| ARENT FOX LLP |
| 1717 K STREET, NW |
| WASHINGTON, DC 20006 |
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