Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/14/2017
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Application #:
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14675683
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Filing Dt:
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03/31/2015
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Publication #:
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Pub Dt:
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02/25/2016
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Inventors:
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Suk-Joo LEE, Yong-Jin CHUN, BYOUNG-IL CHOI
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Title:
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METHOD OF DETECTING FOCUS SHIFT IN LITHOGRAPHY PROCESS, METHOD OF ANALYZING ERROR OF TRANSFERRED PATTERN USING THE SAME AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE METHODS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 129, SAMSUNG-RO, YEONGTONG-GU |
| SUWON-SI, GYEONGGI-DO, KOREA, REPUBLIC OF 443-742 |
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| MUIR PATENT LAW, PLLC |
| 9913 GEORGETOWN PIKE, SUITE 200 |
| BOX 1213 |
| GREAT FALLS, VA 22066 |
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