Patent Assignment Abstract of Title
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Total Assignments:
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Patent #:
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Issue Dt:
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02/21/2017
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Application #:
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13714205
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Filing Dt:
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12/13/2012
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Publication #:
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Pub Dt:
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06/20/2013
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Inventors:
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Marc Léon Van Der Gaag, Leonarda Hendrika Van Den Heuvel et al
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Title:
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PUMP SYSTEM, A CARBON DIOXIDE SUPPLY SYSTEM, AN EXTRACTION SYSTEM, A LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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DE RUN 6501 |
VELDHOVEN, NETHERLANDS NL-5504 DR |
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PILLSBURY WINTHROP SHAW PITTMAN, LLP |
P.O. BOX 10500 |
MCLEAN, VA 22102 |
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