Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/04/2017
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Application #:
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15159054
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Filing Dt:
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05/19/2016
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Publication #:
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Pub Dt:
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09/08/2016
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Inventors:
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Fumihiro TOYOKAWA, Shin-ya NAKAFUJI, Gouji WAKAMATSU
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Title:
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COMPOSITION FOR FORMING A RESIST UNDERLAYER FILM, AND PATTERN-FORMING METHOD
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Assignment:
1
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SECURITY INTEREST (SEE DOCUMENT FOR DETAILS).
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500 WEST MONROE STREET |
CHICAGO, ILLINOIS 60661 |
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OSCAR RUIZ C/O KATTEN MUCHIN ROSENMAN |
525 WEST MONROE STREET |
CHICAGO, IL 60661 |
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