Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/15/2017
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Application #:
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14137225
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Filing Dt:
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12/20/2013
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Publication #:
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Pub Dt:
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07/10/2014
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Inventors:
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Alexey KUZNETZOV, Michael GLEESON, Robbert W. E. VAN DE KRUIJS, Frederik BIJKERK
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Title:
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METHOD FOR PRODUCING A REFLECTIVE OPTICAL ELEMENT FOR EUV-LITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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RUDOLF-EBER-STRASSE 2 |
OBERKOCHEN, GERMANY 73447 |
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GEORGE F. LEHNIGK |
9801 WASHINGTONIAN BLVD. |
SUITE 750 |
GAITHERSBURG, MD 20878 |
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09/27/2024 06:30 AM
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