Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/22/2017
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Application #:
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15351774
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Filing Dt:
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11/15/2016
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Publication #:
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Pub Dt:
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03/02/2017
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Inventors:
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Zheng-Chang MU, Cheng-Wei LIN, Kuang-Wen LIU
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Title:
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PHOTO PATTERN METHOD TO INCREASE VIA ETCHING RATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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16, LI-HSIN ROAD, SCIENCE PARK |
HSIN-CHU, TAIWAN |
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ALSTON & BIRD LLP |
BANK OF AMERICA PLAZA |
101 SOUTH TRYON STREET, SUITE 4000 |
CHARLOTTE, NC 28280-4000 |
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