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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
10/03/2017
Application #:
14867226
Filing Dt:
09/28/2015
Publication #:
Pub Dt:
12/22/2016
Inventors:
Pradeep Vukkadala, Jaydeep Sinha, Jong-Hoon Kim
Title:
PROCESS-INDUCED ASYMMETRY DETECTION, QUANTIFICATION, AND CONTROL USING PATTERNED WAFER GEOMETRY MEASUREMENTS
Assignment: 1
Reel/Frame:
036667/0874Recorded: 09/28/2015Pages: 7
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
09/23/2015
Exec Dt:
09/21/2015
Exec Dt:
09/21/2015
Assignee:
ONE TECHNOLOGY DRIVE
MILPITAS, CALIFORNIA 95035
Correspondent:
SUITER SWANTZ/KLA JOINT CUSTOMER NUMBER
14301 FNB PARKWAY
SUITE 220
OMAHA, NE 68154-5299

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