Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/21/2017
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Application #:
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15287176
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Filing Dt:
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10/06/2016
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Inventors:
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James S. Sims, Ramesh Chandrasekharan, Seshasayee Varadarajan, Jon Henri et al
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Title:
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METHOD FOR DEPOSITING METALS FREE ALD SILICON NITRIDE FILMS USING HALIDE-BASED PRECURSORS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| BUCHANAN INGERSOLL & ROONEY PC |
| 1737 KING STREET |
| SUITE 500 |
| ALEXANDRIA, VA 22314 |
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