Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/12/2017
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Application #:
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14647963
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Filing Dt:
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05/28/2015
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Publication #:
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Pub Dt:
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11/05/2015
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Inventors:
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Kei MATSUMOTO, Kazutaka ERIGUCHI, Tsuyoshi KUBOTA, Noritomo MITSUGI
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Title:
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METHOD OF EVALUATING METAL CONTAMINATION IN SEMICONDUCTOR WAFER AND METHOD OF MANUFACTURING SEMICONDUCTOR WAFER
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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2-1, SHIBAURA 1-CHOME, MINATO-KU, |
TOKYO, JAPAN 105-8634 |
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GREENBLUM & BERNSTEIN, P.L.C. |
1950 ROLAND CLARKE PLACE |
RESTON, VA 20191 |
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