Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/19/2017
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Application #:
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14260210
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Filing Dt:
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04/23/2014
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Publication #:
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Pub Dt:
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10/29/2015
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Inventors:
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Steven M. Zuniga, Brian J. Brown
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Title:
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SYSTEMS, METHODS AND APPARATUS FOR POST-CHEMICAL MECHANICAL PLANARIZATION SUBSTRATE CLEANING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| BRIAN M. DUGAN, DUGAN & DUGAN, PC |
| 245 SAW MILL RIVER ROAD |
| SUITE 309 |
| HAWTHORNE, NY 10532 |
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