Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/13/2018
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Application #:
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15182160
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Filing Dt:
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06/14/2016
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Publication #:
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Pub Dt:
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11/02/2017
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Inventors:
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Chen-Yu Liu, Ching-Yu Chang
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Title:
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Extreme Ultraviolet Lithography with Reduced Exposure Dose and Negative Tone Development
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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NO. 8, LI-HSIN ROAD 6, |
SCIENCE-BASED INDUSTRIAL PARK |
HSIN-CHU, TAIWAN 300-77 |
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HAYNES AND BOONE, LLP IP SECTION |
2323 VICTORY AVENUE |
SUITE 700 |
DALLAS, TX 75219 |
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