Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/27/2018
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Application #:
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14728529
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Filing Dt:
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06/02/2015
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Publication #:
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Pub Dt:
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02/04/2016
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Inventors:
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Ji-myung Kim, Gyu-min Jeong, Kwang-sub Yoon, Tae-hwa Jeong
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Title:
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SUBSTRATE TARGET FOR IN-SITU LITHOGRAPHY METROLOGY, METROLOGY METHOD FOR IN-SITU LITHOGRAPHY, AND METHOD OF MANUFACTURING INTEGRATED CIRCUIT DEVICE BY USING IN-SITU METROLOGY
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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129, SAMSUNG-RO, YEONGTONG-GU |
SUWON-SI, GYEONGGI-DO, KOREA, REPUBLIC OF 443-742 |
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AUDRA WOOTEN |
4140 PARKLAKE AVENUE, SUITE 600 |
RALEIGH, NC 27612 |
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06/27/2024 03:42 PM
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