Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/22/2018
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Application #:
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15315168
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Filing Dt:
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11/30/2016
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Publication #:
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Pub Dt:
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07/06/2017
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Inventor:
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Zhenhai YAO
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Title:
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LITHOGRAPHY STEPPER ALIGNMENT AND CONTROL METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 8 XINZHOU ROAD |
| WUXI NEW DISTRICT, JIANGSU, CHINA 214028 |
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| KAGAN BINDER, PLLC |
| SUITE 200, MAPLE ISLAND BUILDING |
| 221 MAIN STREET NORTH |
| STILLWATER, MN 55082 |
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