Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/12/2018
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Application #:
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14456397
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Filing Dt:
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08/11/2014
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Publication #:
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Pub Dt:
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02/11/2016
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Inventors:
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Rongtao Lu, Allen Hase, Judy Z. Wu, Alan Elliot
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Title:
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APPARATUS FOR IN SITU DEPOSITION OF MULTILAYER STRUCTURES VIA ATOMIC LAYER DEPOSITION AND ULTRA-HIGH VACUUM PHYSICAL OR CHEMICAL VAPOR DEPOSITION
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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1450 JAYHAWK BOULEVARD |
245 STRONG HALL |
LAWRENCE, KANSAS 66045 |
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PHILIP A. POREMBSKI |
2801 WEST BELTLINE HIGHWAY |
STE. 210 |
MADISON, WI 53713 |
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