Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/12/2018
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Application #:
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15597222
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Filing Dt:
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05/17/2017
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Publication #:
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Pub Dt:
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02/08/2018
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Inventors:
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Marc Christophersen, Bernard F. Phlips, Michael K. Yetzbacher
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Title:
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FABRICATION METHOD FOR DIGITAL ETCHING OF NANOMETER-SCALE LEVEL STRUCTURES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ONE LIBERTY CTR., 875 N. RANDOLPH ST, SUITE 1425 |
| CHIEF OF NAVAL RESEARCH, OFFICE OF COUNSEL (ATTN C |
| ARLINGTON, VIRGINIA 22203 |
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| THE GOVERNMENT OF THE UNITED STATES OF AMERICA |
| ONE LIBERTY CTR., 875 N. RANDOLPH ST, SUITE 1425 |
| OFFICE OF COUNSEL (ATTN. CODE 00C1P) |
| ARLINGTON, VA 22203 |
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