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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
6730920
Issue Dt:
05/04/2004
Application #:
09758172
Filing Dt:
01/12/2001
Publication #:
20010008273
Pub Dt:
07/19/2001
Inventors:
Rogier H.M. Groeneveld, Erik R. Loopstra, Jacobus Burghoom, Leon M. Levasier et al
Title:
ABBE ARM CALIBRATION SYSTEM FOR USE IN LITHOGRAPHIC APPARATUS
Assignment: 1
Reel/Frame:
011460/0656Recorded: 01/12/2001Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
GROENEVELD, ROGIER HERMAN MATHIJS
Exec Dt:
01/03/2001
LOOPSTRA, ERIK ROELOF
Exec Dt:
01/03/2001
BURGHOOM, JACOBUS
Exec Dt:
01/03/2001
LEVASIER, LEON MARTIN
Exec Dt:
01/03/2001
STRAAIJER, ALEXANDER
Exec Dt:
01/03/2001
Assignee:
ASM LITHOGRAPHY B.V.
DE RUN 1110,
NL-5503 LA VELDHOVEN, NETHERLANDS
Correspondent:
PILLSBURY WINTHROP LLP
ROBERT C. F. PEREZ
INTELLECTUAL PROPERTY GROUP
1100 NEW YORK AVENUE, NW, NINTH FLOOR
WASHINGTON, D .C. 20005-3918
Assignment: 2
Reel/Frame:
012735/0001Recorded: 03/28/2002Pages: 18
Conveyance:
CHANGE OF NAME (SEE DOCUMENT FOR DETAILS).
Assignor:
ASM LITHOGRAPHY B.V.
Exec Dt:
01/25/2002
Assignee:
ASML NETHERLANDS B.V.
DE RUN 1110
5503 LA VELDHOVEN, NETHERLANDS
Correspondent:
PILLSBURY WINTHROP LLP
JACK S. BARUFKA
INTELLECTUAL PROPERTY GROUP
1600 TYSONS BOULEVARD
MCLEAN, VIRGINIA 22102

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