Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/01/2003
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Application #:
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09815176
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Filing Dt:
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03/22/2001
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Publication #:
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Pub Dt:
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10/11/2001
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Inventor:
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Tomoharu Fujiwara
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Title:
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CHARGED-PARTICLE-BEAM MICROLITHOGRAPHY APPARATUS INCLUDING SELECTABLE SYSTEMS FOR DETERMINING ALIGNMENT-MARK POSITION, AND DEVICE-FABRICATION METHODS UTILIZING SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| FUJI BUILDING 2-3 MARUNOUCHI 3-CHOME |
| CHIYODA-KU, TOKYO 100, JAPAN |
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| KLARQUIST SPARKMAN CAMPBELL LEIGH,ET AL |
| DONALD L. STEPHENS JR. |
| 121 S.W. SALMON STREET |
| ONE WORLD TRADE CENTER, SUITE 1600 |
| PORTLAND STATE OREGON 97204-2988 |
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