Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/25/2003
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Application #:
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09839292
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Filing Dt:
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04/23/2001
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Publication #:
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Pub Dt:
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11/01/2001
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Inventors:
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Takeshi Sakuma, Kenji Homma, Takahiro Horiguchi
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Title:
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SINGLE-SUBSTRATE-HEAT-PROCESSING APPARATUS FOR SEMICONDUCTOR PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3-6 AKASAKA 5-CHOME, MINATO-KU |
TOKYO, 107-8481, JAPAN |
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OBLON, SPIVAK, MCCLELLAND ET AL. |
C. IRVIN MCCLELLAND |
1755 JEFFERSON DAVIS HWY, 4TH FLR |
ARLINGTON, VA 22202 |
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