Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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08925985
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Filing Dt:
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09/09/1997
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Publication #:
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Pub Dt:
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12/06/2001
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Inventors:
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ROGER PATRICK, PHILLIP L. JONES
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Title:
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APPARATUS FOR IMPROVING ETCH UNIFORMITY AND METHODS THEREFOR
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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4650 CUSHING PARKWAY |
FREMONT, CALIFORNIA 94538 |
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HICKMAN BEYER & WEAVER |
JOSEPH A. NGUYEN |
P.O. BOX 61059 |
PALO ALTO, VA 94306 |
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