Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/09/2003
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Application #:
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09884985
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Filing Dt:
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06/21/2001
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Publication #:
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Pub Dt:
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12/27/2001
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Inventor:
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Takahiro Horiguchi
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Title:
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SINGLE-SUBSTRATE-PROCESSING APPARATUS FOR SEMICONDUCTOR PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3-6 AKASAKA 5-CHOME, MINATO-KU |
TOKYO 107-8481, JAPAN |
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OBLON, SPIVAK, MCCLELLAND, MAIER ET AL. |
C. IRVIN MCCLELLAND |
FOURTH FLOOR |
1755 JEFFERSON DAVIS HIGHWAY |
ARLINGTON, VIRGINIA 22202 |
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