Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/30/2002
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Application #:
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09192810
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Filing Dt:
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11/16/1998
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Publication #:
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Pub Dt:
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01/17/2002
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Inventors:
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LEROY LUO, RENE GEORGE, STEPHEN E. SAVAS, CRAIG RANFT, WOLFGANG HELLE, ROBERT GUERRA
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Title:
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SYSTEMS AND METHODS FOR VARIABLE MODE PLASMA ENHANCED PROCESSING OF SEMICONDUCTOR WAFERS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3550 WEST WARREN AVENUE |
FREMONT, CALIFORNIA 94538 |
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WILSON SONSINI GOODRICH & ROSATI |
MICHAEL J. MURPHY |
650 PAGE MILL ROAD |
PALO ALTO, CA 94304-1050 |
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