Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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09865734
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Filing Dt:
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05/29/2001
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Publication #:
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Pub Dt:
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01/17/2002
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Inventor:
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Yasuhiro Omura
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Title:
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Projection optical system, exposure apparatus incorporating this projection optical system, and manufacturing method for micro devices using the exposure apparatus
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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2-3, MARUNOUCHI 3-CHOME |
TOKYO, JAPAN |
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FINNEGAN, HENDERSON, FARABOW ET AL |
MR. ERNEST F. CHAPMAN |
1300 I STREET, N.W. |
WASHINGTON, DC 20005-3315 |
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