Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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09864223
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Filing Dt:
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05/25/2001
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Publication #:
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Pub Dt:
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01/31/2002
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Inventors:
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Hiroyuki Yamamoto, Kazuaki Nishimura, Kazuhide Hasebe, Phillip Spaull
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Title:
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Etching method, processing apparatus and etching apparatus
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6, AKASAKA 5-CHOME |
| MINATO-KU, TOKYO-TO, JAPAN |
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| SMITH, GAMBRELL & RUSSELL, LLP |
| MICHAEL A. MAKUCH |
| 1850 M STREET N.W., SUITE 800 |
| WASHINGTON, DC 20036 |
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