Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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09816643
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Filing Dt:
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03/23/2001
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Publication #:
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Pub Dt:
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02/14/2002
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Inventors:
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Seiyo Nakashima, Michiko Nishiwaki, Yukinori Aburatani, Satoshi Okada, Eisuke Nishitani et al
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Title:
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Substrate processing apparatus and substrate processing method
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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HIGASHI-NAKANO |
14-20, 3-CHOME |
NAKANO-KU, TOKYO 164-8511, JAPAN |
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HOGAN & HARTSON LLP |
MICHAEL CRAPENHOFT, ESQ. |
500 SOUTH GRAND AVENUE |
SUITE 1900 |
LOS ANGELES, CA 90071 |
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