Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/15/2003
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Application #:
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09918979
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Filing Dt:
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07/31/2001
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Publication #:
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Pub Dt:
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02/14/2002
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Inventors:
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William Drohan, William Goldfarb, Peter Harvey, Jaydeep Sinha
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Title:
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WAFER SHAPE ACCURACY USING SYMMETRIC AND ASYMMETRIC INSTRUMENT ERROR
SIGNATURES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 80 WILSON WAY |
| WESTWOOD, MASSACHUSETTS 02090 |
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| WEINGARTEN, SCHURGIN, GAGNEBIN & |
| LEBOVICI LLP |
| CHARLES L. GAGNEBIN III |
| TEN POST OFFICE SQUARE |
| BOSTON, MASSACHUSETTS 02109 |
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