Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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05/27/2003
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Application #:
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09933506
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Filing Dt:
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08/20/2001
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Publication #:
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Pub Dt:
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03/14/2002
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Inventors:
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Peter Ressel, Andreas Scheffler
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Title:
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MULTI-BEAM EXPOSURE METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 69115 HEIDELBERG |
| KURFURSTEN, ANLAGE 52-60, GERMANY |
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| HILL & SIMPSON P.C. |
| BRETT A. VALIQUET |
| 233 S. WACKER DRIVE |
| 85TH FLOOR SEARS TOWER |
| CHICAGO, IL 60606 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| PHILIPP REIS WEG 5 |
| 24148 KIEL, GERMANY |
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| SCHIFF HARDIN & WAITE |
| BRETT A. VALIQUET |
| 6600 SEARS TOWER |
| 233 S. WACKER DRIVE |
| CHICAGO, ILLINOIS 60606-6473 |
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Assignment:
3
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| PHILLIPP-REIS-WEG 5 |
| KIEL, GERMANY D-24148 |
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| SCHIFF HARDIN, LLP |
| PATENT DEPARTMENT |
| 6600 SEARS TOWER |
| CHICAGO, IL 60606-6473 |
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