Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/01/2003
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Application #:
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09943466
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Filing Dt:
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08/30/2001
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Publication #:
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Pub Dt:
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04/18/2002
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Inventors:
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Bradford G. Ackerman, Bradley F. Bowden, Claude L. Davis JR., Kenneth E. Hrdina
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Title:
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SILICA-BASED LIGHT-WEIGHT EUV LITHOGRAPHY STAGES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| PATENT DEPT. SP-TI-03-1 |
| CORNING, NEW YORK 14831 |
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| CORNING INCORPORATED |
| EDWARD F. MURPHY |
| PATENT DEPARTMENT |
| SP-TI-03-1 |
| CORNING, NY 14831 |
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