Patent Assignment Abstract of Title
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
Total Assignments:
1
|
Patent #:
|
|
Issue Dt:
|
12/24/2002
|
Application #:
|
09943045
|
Filing Dt:
|
08/30/2001
|
Publication #:
|
|
Pub Dt:
|
04/18/2002
| | | | |
Inventor:
|
Kazunori Matsuura
|
Title:
|
CVD METHOD FOR PRODUCING AN INTERCONNECTION FILM BY DEPOSITING A LOWER LAYER TO FILL A RECESS PERFORMING A CLEANING STEP TO REMOVE DISSOCIATED REACTANT GAS, AND CONSEQUENTLY DEPOSITING AN UPPER LAYER THAT HAS A SMALLER IMPURITY CONCENTRATION THAN THE LOWER LAYER
|
|
Assignment:
1
|
|
|
|
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
|
|
|
|
|
|
1753 SHIMONUMABE |
NAKAHARA-KU, KAWASAKI |
KANAGAWA 211-8668, JAPAN |
|
|
|
SCULLY, SCOTT, MURPHY & PRESSER |
PAUL J. ESATTO |
400 GARDEN CITY PLAZA |
GARDEN CITY, NY 11530 |
|
|
Search Results as of:
05/02/2024 09:17 AM
If you have any comments or questions concerning the data displayed,
contact
PRD / Assignments at 571-272-3350. v.2.6
Web interface last modified:
August 25, 2017 v.2.6
|