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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
10011420
Filing Dt:
12/04/2001
Publication #:
Pub Dt:
04/25/2002
Inventors:
Keiichiro Tounai, Takeshi Hamamoto
Title:
Optical proximity effect correcting method and mask data forming method in semiconductor manufacturing process, which can sufficiently correct optical proximity effect, even under various situations with regard to size and shape of design pattern, and space width and position relation between design patterns
Assignment: 1
Reel/Frame:
013736/0321Recorded: 02/19/2003Pages: 6
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
11/01/2002
Assignee:
1753 SHIMONUMABE, NAKAHARA-KU, KAWASAKI
KANAGAWA 211-8668, JAPAN
Correspondent:
HAYES SOLSOWAY P.C.
NORMAN P. SOLOWAY
130 W. CUSHING STREET
TUCSON, AZ 85701

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