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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
07/12/2005
Application #:
09986287
Filing Dt:
11/08/2001
Publication #:
Pub Dt:
05/09/2002
Inventor:
Hiroki Obi
Title:
METHOD FOR ALIGNING TWO OBJECTS, METHOD FOR DETECTING SUPERIMPOSING STATE OF TWO OBJECTS, AND APPARATUS FOR ALIGNING TWO OBJECTS
Assignment: 1
Reel/Frame:
012307/0796Recorded: 11/08/2001Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
10/25/2001
Assignee:
3-6 AKASAKA 5-CHOME, MINATO-KU
TOKYO 107-8481, JAPAN
Correspondent:
OBLON, SPIVAK, MCCLELLAND ET AL.
MARVIN J. SPIVAK
FOURTH FLOOR, 1755 JEFFERSON DAVIS HWY
ARLINGTON, VIRGINIA 22202

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