Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/27/2003
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Application #:
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09903667
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Filing Dt:
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07/13/2001
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Publication #:
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Pub Dt:
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05/09/2002
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Inventor:
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Ching-Yu Chang
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Title:
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METHOD FOR SHRINKING CRITICAL DIMENSION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 16, LI-HSIN ROAD, SCIENCE-BASED INDUSTRIAL PARK |
| HSIN-CHU CITY, TAIWAN |
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| LOWE HAUPTMAN GILMAN & BERNER |
| BENJAMIN J. HAUPTMAN |
| 1700 DIAGONAL ROAD, SUITE 310 |
| ALEXANDRIA, VA 22314 |
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