Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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09916702
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Filing Dt:
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07/26/2001
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Publication #:
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Pub Dt:
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06/20/2002
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Inventors:
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Mao-Chang Yeh, Ta Chin Chen, Chen Lung Fan, Kai Chin Chang, Jing Kae Liu
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Title:
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Method for cleaning a metal etching chamber
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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4650 CUSHING PARKWAY |
FREMONT, CALIFORNIA 94538 |
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LAM RESEARCH CORPORATION |
MICHAEL S. BRANDT |
4650 CUSHING PARKWAY, CA-1 |
FREMONT, CA 94538 |
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