Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/24/2004
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Application #:
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10010135
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Filing Dt:
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12/06/2001
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Publication #:
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Pub Dt:
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06/27/2002
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Inventor:
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Uwe W. Hamm
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Title:
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PROCESS AND DEVICE FOR IN-SITU DECONTAMINATION OF A EUV LITHOGRAPHY DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| CARL-ZEISS-STR. 22 |
| OBERKOCHEN, GERMANY 73447 |
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| HUDAK SHUNK & FARINE |
| DANIEL J. HUDAK |
| 2020 FRONT STREET, SUITE 307 |
| CUYAHOGA FALLS, OH 44221 |
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