Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/25/2003
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Application #:
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10053880
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Filing Dt:
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01/24/2002
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Publication #:
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Pub Dt:
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08/22/2002
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Inventors:
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Satoshi Motouji, Iichi Hirao, Teruyuki Hayashi, Misako Saito
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Title:
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METHOD FOR DECIDING ON THE TIMING OF REPLACING A CHEMICAL FILTER, FILTER LIFE DETECTION SENSOR, CHEMICAL FILTER UNIT, AND SEMICONDUCTOR MANUFACTURING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 801, MINAMIFUDODO-CHO, HORIKAWAHIGASHIIRU |
| SHIOKOJI-DORI, SHIMOGYO-KU |
| KYOTO-SHI, KYOTO 600-8530, JAPAN |
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| 3-6, AKASAKA 5-CHOME |
| MINATO-KU |
| TOKYO 107-8481, JAPAN |
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| FOLEY & LARDNER |
| WILLIAM T. ELLIS |
| WASHINGTON HARBOUR |
| 3000 K STREET, N.W., SUITE 500 |
| WASHINGTON, DC 20007-5143 |
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