Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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06/17/2003
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Application #:
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09792205
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Filing Dt:
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02/23/2001
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Publication #:
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Pub Dt:
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08/29/2002
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Inventors:
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Tobias Mono, Uwe Paul Schroeder
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Title:
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METHOD AND APPARATUS FOR DETERMINING PHOTORESIST PATTERN LINEARITY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1730 NORTH FIRST STREET |
| SAN JOSE, CALIFORNIA 95112 |
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| SLATER & MATSIL, L.L.P. |
| IRA S. MATSIL |
| 15150 PRESTON RD., SUITE 300 |
| DALLAS, TEXAS 75248 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ST. MARTIN-STR. 53 81541 |
| MUNICH, GERMANY |
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| SIEMENS CORPORATION, IP DEPARTMENT |
| ELSA KELLER |
| 186 WOOD AVENUE SOUTH |
| ISELIN, NJ 08830 |
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