Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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09799158
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Filing Dt:
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03/05/2001
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Publication #:
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Pub Dt:
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09/05/2002
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Inventors:
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Ching-An Chen, Hong-Ji Lee, David Guang-Kai Jeng
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Title:
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Multi-chamber system for semiconductor process
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| SCIENCE-BASED INDUSTRIAL PARK |
| IF, NO. 5-2, INDUSTRY E RD. IX |
| HSINCHU, TAIWAN R.O.C |
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| THOMAS, KAYDEN, HORSTEMEYER ET AL |
| DANIEL R. MCCLURE |
| 100 GALLERIA PKWY, STE 1750 |
| ATLANTA, GA 30339 |
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