Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/05/2003
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Application #:
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09946632
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Filing Dt:
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09/06/2001
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Publication #:
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Pub Dt:
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09/26/2002
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Inventors:
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Seung-Ki Chae, Sang-Gon Lee, Sang-Hyuk Chung, Seong-Jin Heo
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Title:
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METHOD AND APPARATUS FOR REDUCING PFC EMISSION DURING SEMICONDUCTOR MANUFACTURE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 416 MAETAN-DONG, PALDAL-GU |
| SUWON-CITY, KYUNGKI-DO, KOREA, REPUBLIC OF |
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| THE LAW OFFICES OF EUGENE M. LEE PLLC |
| EUGENE M. LEE |
| 2111 WILSON BOULEVARD |
| SUITE 1200 |
| ARLINGTON, VA 22201 |
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