Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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09821753
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Filing Dt:
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03/30/2001
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Publication #:
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Pub Dt:
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10/03/2002
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Inventors:
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Tuqiang Ni, Frank Y. Lin, Weinan Jiang, Chung-Ho Huang
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Title:
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Plasma processing method and apparatus with control of plasma excitation power
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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4650 CUSHING PARKWAY |
FREMONT, CALIFORNIA 94538 |
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LOWE HAUPTMAN GILMAN & BERNER, LLP |
ALLAN M. LOWE |
1700 DIAGONAL ROAD |
SUITE 310 |
ALEXANDRIA, VA 22314 |
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